9013526.33
JULABO
Product details
JULABO's 9013526.33 redefines thermal control standards in Thermal - Liquid Cooling, Heating, optimized for semiconductor manufacturing processes requiring sub-degree temperature accuracy. This precision instrument combines multi-stage cooling with real-time thermal profiling, essential for wafer fabrication cleanrooms.As a Recirculating Heater system, it incorporates dual redundant cooling circuits with automatic load balancing, ensuring continuous operation during maintenance cycles.Compatible with 230V mains power, the universal input design includes harmonic filtering to prevent contamination of sensitive metrology equipment power supplies.Precision flow control maintains 7.13GPM (27.0LPM) with 0.5% repeatability, critical for maintaining uniform etch rates across semiconductor wafers.The 26000ML (879.2 oz) fluid volume incorporates deionization monitoring, automatically triggering purification cycles when resistivity falls below 18M cm.Stable across 20°C ~ 200°C, the system utilizes Peltier-assisted heat exchangers for rapid temperature transitions during thermal cycling tests.With 24.40" L x 15.40" W x 18.90" H (619.8mm x 391.2mm x 480.1mm) dimensions, the vertical stack configuration saves valuable cleanroom floor space while maintaining service accessibility.Meeting CE certification requirements, all wetted materials comply with SEMI F57 standards for high-purity fluid handling.Advanced Adjustable Pump, Flow Diverter, USB A, USB B, RS232 include FOUP-compatible interfaces and SECS/GEM protocol support for automated material handling system integration.
Product Attributes
- Product Status: Active
- Product Type: Recirculating Heater
- Power - Cooling: -
- Current: -
- Voltage: 230V
- Flow Rate: 7.13GPM (27.0LPM)
- Power Input: -
- Thermal Resistance @ GPM: -
- Fluid Capacity: 26000ML (879.2 oz)
- Operating Temperature: 20°C ~ 200°C
- Connection Type: -
- Weight: -
- Dimensions - Overall: 24.40" L x 15.40" W x 18.90" H (619.8mm x 391.2mm x 480.1mm)
- Ratings: CE
- Features: Adjustable Pump, Flow Diverter, USB A, USB B, RS232