ATS-CHILL600V
Advanced Thermal Solutions Inc.
ATS-CHILL600V
Advanced Thermal Solutions Inc.
RECIRC CHILLER 15LPM 600W
Reference Price (USD)
1+
$3175.73000
500+
$3143.9727
1000+
$3112.2154
1500+
$3080.4581
2000+
$3048.7008
2500+
$3016.9435
Exquisite packaging
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ATS-CHILL600V
$3,175.73
Product details
Advanced Thermal Solutions Inc.'s ATS-CHILL600V redefines thermal control standards in Thermal - Liquid Cooling, Heating, optimized for semiconductor manufacturing processes requiring sub-degree temperature accuracy. This precision instrument combines multi-stage cooling with real-time thermal profiling, essential for wafer fabrication cleanrooms.As a Active, Recirculating Chiller system, it incorporates dual redundant cooling circuits with automatic load balancing, ensuring continuous operation during maintenance cycles.The 600 W thermal capacity handles simultaneous cooling of multiple process chambers, featuring adaptive PID control for 0.1 C setpoint maintenance.Compatible with 120/220VAC mains power, the universal input design includes harmonic filtering to prevent contamination of sensitive metrology equipment power supplies.Precision flow control maintains 3.96GPM (15.0LPM) with 0.5% repeatability, critical for maintaining uniform etch rates across semiconductor wafers.The 4500ML (152.2 oz) fluid volume incorporates deionization monitoring, automatically triggering purification cycles when resistivity falls below 18M cm.Stable across 5°C ~ 35°C, the system utilizes Peltier-assisted heat exchangers for rapid temperature transitions during thermal cycling tests.The 51 lbs (23.1 kg) structural design employs magnesium alloy framing, providing vibration isolation for nanometer-scale lithography applications.With 18.70" L x 9.25" W x 19.30" H (475mm x 235mm x 490mm) dimensions, the vertical stack configuration saves valuable cleanroom floor space while maintaining service accessibility.
Product Attributes
- Product Status: Active
- Product Type: Active, Recirculating Chiller
- Power - Cooling: 600 W
- Current: -
- Voltage: 120/220VAC
- Flow Rate: 3.96GPM (15.0LPM)
- Power Input: -
- Thermal Resistance @ GPM: -
- Fluid Capacity: 4500ML (152.2 oz)
- Operating Temperature: 5°C ~ 35°C
- Connection Type: -
- Weight: 51 lbs (23.1 kg)
- Dimensions - Overall: 18.70" L x 9.25" W x 19.30" H (475mm x 235mm x 490mm)
- Ratings: -
- Features: -
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