EN63
Eaton - Bussmann Electrical Division
Product details
Eaton - Bussmann Electrical Division's EN63 represents a quantum leap in Terminal Blocks - Power Distribution technology for semiconductor manufacturing equipment. Designed for cleanroom environments, it delivers ultra-stable power distribution while preventing particulate contamination.This contamination-controlled Power Distribution Block is specifically engineered for wafer processing tools where power quality and cleanliness are equally critical.The 3-pole architecture provides isolated power paths for sensitive process modules, preventing electrical noise transfer between critical fabrication steps.Featuring 1 line side inputs, the terminal block supports redundant power feeds for uninterrupted semiconductor production.With 6 load side outputs, this solution enables precise power distribution to multiple process chambers while maintaining sub-millivolt stability.The Stud system utilizes special coatings to prevent outgassing in vacuum environments while ensuring reliable power transmission.Incorporating Terminal Blocks technology, the terminal block allows for gloved-hand servicing in ISO Class 3 cleanrooms without compromising performance.Designed for 300MCM (kcmil) - #4CU/AL conductors, this solution accommodates both high-current RF generator connections and delicate sensor wiring.The 6-14 AWG CU, 6-12 AWG AL compatibility ensures proper termination of specialized cabling used in extreme high-vacuum applications.Rated for 600 V operation, this component meets semiconductor equipment standards for ultra-clean power distribution.With 285 A current rating, the design handles the precise power requirements of plasma etching and deposition systems without introducing electrical noise.
Product Attributes
- Product Status: Obsolete
- Type: Power Distribution Block
- Number of Poles: 3
- Line Side Connections Per Pole: 1
- Load Side Connections Per Pole: 6
- Line Side Connection Type: Stud
- Load Side Connection Type: Terminal Blocks
- Line Side Wire/Stud Size: 300MCM (kcmil) - #4CU/AL
- Load Side Wire/Stud Size: 6-14 AWG CU, 6-12 AWG AL
- Voltage - Rated: 600 V
- Current Rating (Amps): 285 A